Zhang Hui, Su Zhongqian^*

Liaoning Institute of science and technology

Abstract：

To meet high-precision micro-angle measurement needs in precision manufacturing and MEMS, this study proposes a Hall effect-based method. Theoretically, Hall voltageUHis proportional to operating current × perpendicular magnetic intensityB⊥,which varies sinusoidal with angle θ.Experiments (r=10cm}) confirm linear UH-B⊥(0–48V, consistent with theory). Angle inversion via arccos (UHmax) has <2° error (30°–60°), 5° for θ<15^° (low SNR). Phased voltage changes stem from magnetic inhomogeneity and Hall dead zone. This validates the method, aiding its use in precision instruments.

Key Words：

Hall; magnetic flux; hall element; magnetic induction intensity